@article {667501, title = {Faraday cage angled-etching of nanostructures in bulk dielectrics}, journal = {Journal of Vacuum Science \& Technology B}, volume = {34}, year = {2016}, pages = {041801}, url = {http://scitation.aip.org/content/avs/journal/jvstb/34/4/10.1116/1.4944854}, author = {Latawiec, Pawel and Michael J. Burek and Sohn, Young-Ik and Loncar, Marko} }