@article {608006,
	title = {Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities},
	journal = {Optics Letters},
	volume = {36},
	year = {2011},
	pages = {421-423},
	isbn = {1539-4794},
	url = {https://www.osapublishing.org/ol/abstract.cfm?uri=ol-36-3-421},
	author = {Khan, Mughees and Babinec, Thomas and McCutcheon, Murray W and Deotare, Parag and Lon{\v c}ar, Marko}
}
