@article {667501,
	title = {Faraday cage angled-etching of nanostructures in bulk dielectrics},
	journal = {Journal of Vacuum Science \& Technology B},
	volume = {34},
	year = {2016},
	pages = {041801},
	url = {http://scitation.aip.org/content/avs/journal/jvstb/34/4/10.1116/1.4944854},
	author = {Latawiec, Pawel and Michael J. Burek and Sohn, Young-Ik and Loncar, Marko}
}
