Control of buckling in large micromembranes using engineered support structures
Publication information:
Eiji Iwase, Pui-Chuen Hui, David Woolf, Alejandro Rodriguez, Steven Johnson, Federico Capasso, and Marko Lončar. 2012. “Control of Buckling in Large Micromembranes Using Engineered Support Structures”. Journal of Micromechanics and Microengineering, 22, Pp. 065028