Citation:
Eiji Iwase, Pui-Chuen Hui, David Woolf, Alejandro W Rodriguez, Steven G Johnson, Federico Capasso, and Marko Lončar. 2012. “Control of buckling in large micromembranes using engineered support structures.” Journal of Micromechanics and Microengineering, 22, Pp. 065028. Publisher's Version
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