Design and focused ion beam fabrication of single crystal diamond nanobeam cavities
Publication information:
Thomas Babinec, Jennifer Choy, Kirsten JM Smith, Mughees Khan, and Marko Lončar. 2011. “Design and Focused Ion Beam Fabrication of Single Crystal Diamond Nanobeam Cavities”. Journal of Vacuum Science & Technology B, 29, Pp. 010601