Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities
Publication information:
Mughees Khan, Thomas Babinec, Murray McCutcheon, Parag Deotare, and Marko Lončar. 2011. “Fabrication and Characterization of High-Quality-Factor Silicon Nitride Nanobeam Cavities”. Optics Letters, 36, Pp. 421-23