Faraday cage angled-etching of nanostructures in bulk dielectrics
Publication information:
Pawel Latawiec, Michael J. Burek, Young-Ik Sohn, and Marko Loncar. 2016. “Faraday Cage Angled-Etching of Nanostructures in Bulk Dielectrics”. Journal of Vacuum Science & Technology B, 34, Pp. 041801