Freestanding nanostructures via reactive ion beam angled etching
Publication information:
Haig A. Atikian, Pawel Latawiec, Michael J. Burek, Young-Ik Sohn, Srujan Meesala, Normand Gravel, Ammar B. Kouki, and Marko Loncar. 2017. “Freestanding Nanostructures via Reactive Ion Beam Angled Etching”. APL Photonics, 2, Pp. 051301